Conductive AFM for CNT characterization
نویسندگان
چکیده
We report on and emphasize the versatility of conductive atomic force microscopy in characterizing vertically aligned carbon nanotubes (CNTs) aimed to be used in via interconnect technology. The study is conducted on multi-walled CNT arrays vertically grown on a copper-based metal line. Voltage-dependent current mapping and current-voltage characteristics recorded down to single CNT allow for a comprehensive insight into the electric behaviour of the hybrid structure.
منابع مشابه
Characteristics of size dependent conductivity of the CNT-interconnects formed by low temperature process
0026-2714/$ see front matter 2013 Elsevier Ltd. A http://dx.doi.org/10.1016/j.microrel.2013.03.001 ⇑ Corresponding author. Tel.: +886 734 747 0177; f E-mail address: [email protected] (W.-C. Chiu) In this paper, a simple and low temperature fabrication process, slow spin rate coating and dry etching, is proposed to construct the CNT-interconnects for future VLSI interconnect applications. Two ...
متن کاملNanoscale optical and electrical characterization of horizontally aligned single-walled carbon nanotubes
During the recent years, a significant amount of research has been performed on single-walled carbon nanotubes (SWCNTs) as a channel material in thin-film transistors (Pham et al. IEEE Trans Nanotechnol 11:44-50, 2012). This has prompted the application of advanced characterization techniques based on combined atomic force microscopy (AFM) and Raman spectroscopy studies (Mureau et al. Electroph...
متن کاملSimultaneous Electrical and Mechanical Property Mapping at the Nanoscale with PeakForce TUNA
through PeakForce QNMTM, 3) correlated nanoscale AFM-based conductivity measurements are a powerful technique for nanometer-scale electrical characterization on a wide range of samples. Traditionally, these measurements have been categorized into two classes: Conductive AFM (CAFM), which covers the higher current range (sub-nA up to μA), and Tunneling AFM (TUNA), which covers the lower current ...
متن کاملEnhanced electrical properties of vertically aligned carbon nanotube-epoxy nanocomposites with high packing density
During their synthesis, multi-walled carbon nanotubes can be aligned and impregnated in a polymer matrix to form an electrically conductive and flexible nanocomposite with high backing density. The material exhibits the highest reported electrical conductivity of CNT-epoxy composites (350 S/m). Here, we show how conductive atomic force microscopy can be used to study the electrical transport me...
متن کاملSub-surface imaging of carbon nanotube-polymer composites using dynamic AFM methods.
High-resolution sub-surface imaging of carbon nanotube (CNT) networks within polymer nanocomposites is demonstrated through electrical characterization techniques based on dynamic atomic force microscopy (AFM). We compare three techniques implemented in the single-pass configuration: DC-biased amplitude modulated AFM (AM-AFM), electrostatic force microscopy (EFM) and Kelvin probe force microsco...
متن کامل